US Patent 7427754 - Random telegraph signal nanoMOS probe

http://www.freepatentsonline.com/7427754.html

This patent from the University of California System teaches a new type of microscopy probe based on carbon nanotubes capable of inspecting for molecular or atomic defects in nanoelectronic devices. Claim 1 reads:

1. A microscopy probe comprising:

a substantially defect-free dielectric material having a first side and a second side;

a first electrode and a second electrode disposed on a first side of the substantially defect-free dielectric material;

a third electrode and a fourth electrode disposed on the first side of the substantially defect-free dielectric material;

a first nanotube connecting the first electrode to the second electrode, the nanotube having a tip portion and a second nanotube connecting the third electrode to the fourth electrode, the second nanotube having a tip portion; and

a gate electrode disposed on a second side of the substantially defect-free dielectric material.