US Patent 7616367 - Carbon fiber MEMS

http://www.freepatentsonline.com/7616367.html

In order to produce higher deflections and higher switching speeds for MEMS optical devices this patent from Cornell Research Foundation teaches using graphene or carbon nanotube fibers as the bending portion of the MEMS device. Claim 1 reads:

1. A micro-electro-mechanical device scanner comprising:

a substrate;

a fiber supported by the substrate at a clamped end of the fiber; and

a mirror supported by a second, free end of the fiber.