Thursday, May 14, 2009

US Patent 7532386 - MEMS offset voltage modification

This patent from Iridigm Display Corp. (acquired by Qualcomm) includes some very basic claims to a manufacturing process of MEMS devices including an offset voltage correction step. Claim 1 reads:

1. A process development method, comprising:

identifying at least one processing parameter for manufacturing a MEMS device that results in a non-zero offset voltage for the MEMS device; and

modifying the processing parameter to shift the non-zero offset voltage closer to zero.

Labels: ,