US Patent 7532386 - MEMS offset voltage modification
http://www.freepatentsonline.com/7532386.html
This patent from Iridigm Display Corp. (acquired by Qualcomm) includes some very basic claims to a manufacturing process of MEMS devices including an offset voltage correction step. Claim 1 reads:
1. A process development method, comprising:
identifying at least one processing parameter for manufacturing a MEMS device that results in a non-zero offset voltage for the MEMS device; and
modifying the processing parameter to shift the non-zero offset voltage closer to zero.
This patent from Iridigm Display Corp. (acquired by Qualcomm) includes some very basic claims to a manufacturing process of MEMS devices including an offset voltage correction step. Claim 1 reads:
1. A process development method, comprising:
identifying at least one processing parameter for manufacturing a MEMS device that results in a non-zero offset voltage for the MEMS device; and
modifying the processing parameter to shift the non-zero offset voltage closer to zero.
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