US Patent 8011296 - Supercritical fluid assisted printing of nanoparticles
http://www.freepatentsonline.com/8011296.html
This patent from Micron Technology discloses a high throughput deposition method for a pattern of nanoparticles using a maskless technique which does not require photolithography. Claim 1 reads:
1. A system for the maskless writing of a pattern on a substrate, comprising:
a support;
an unmasked substrate supported by the support;
a discharge assembly for masklessly discharging a solution directly to a surface of the unmasked substrate, the solution comprising nanometer-sized particles dissolved or dispersed in a supercritical fluid; and
a charging device for electrically charging the nanometer-sized particles.
This patent from Micron Technology discloses a high throughput deposition method for a pattern of nanoparticles using a maskless technique which does not require photolithography. Claim 1 reads:
1. A system for the maskless writing of a pattern on a substrate, comprising:
a support;
an unmasked substrate supported by the support;
a discharge assembly for masklessly discharging a solution directly to a surface of the unmasked substrate, the solution comprising nanometer-sized particles dissolved or dispersed in a supercritical fluid; and
a charging device for electrically charging the nanometer-sized particles.
Labels: Micron Technology
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