US Patent 7887885 - Molecular resist removal with DPN
http://www.freepatentsonline.com/7887885.html
This patent teaches a variation of Dip Pen Lithography® in which the scanning probe tip removes a portion of molecular resist during coating. Claim 1 reads:
1. A method of nano lithography comprising:
providing a substrate;
coating at least a portion of the substrate with a resist;
providing a tip with a drop of patterning compound on the tip;
applying the tip to a portion of the substrate coated with the resist wherein a high normal force is formed between the tip and the substrate by the surface tension of the drop of patterning compound on the tip that forms a thin film of the patterning compound on the substrate in an area proximate the tip; and,
moving the tip to remove resist from the substrate, whereupon the patterning compound attaches to the substrate from which the resist has been removed by the tip to form a pattern of the patterning compound on the substrate.
This patent teaches a variation of Dip Pen Lithography® in which the scanning probe tip removes a portion of molecular resist during coating. Claim 1 reads:
1. A method of nano lithography comprising:
providing a substrate;
coating at least a portion of the substrate with a resist;
providing a tip with a drop of patterning compound on the tip;
applying the tip to a portion of the substrate coated with the resist wherein a high normal force is formed between the tip and the substrate by the surface tension of the drop of patterning compound on the tip that forms a thin film of the patterning compound on the substrate in an area proximate the tip; and,
moving the tip to remove resist from the substrate, whereupon the patterning compound attaches to the substrate from which the resist has been removed by the tip to form a pattern of the patterning compound on the substrate.
Labels: Nanoink, Northwestern University
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