US Patent 7682973 - Buffer layer in CNT growth
http://www.freepatentsonline.com/7682973.html
When growing arrays of carbon nanotubes catalyst particles are often used as a basis for carbon to be precipitated in a tube shape. However, at high temperatures agglomeration of the catalytic particles can hinder the control of the size and density of nanotube growth. This patent from Samsung teaches using a buffer layer to prevent the agglomeration of the catalysts. Claim 1 reads:
1. A method of forming a Carbon Nanolube (CNT) structure, the method comprising:
forming an electrode on a substrate; forming a buffer layer on the electrode;
forming a catalyst layer in a particle shape on the buffer layer;
etching the buffer layer exposed through the catalyst layer; and
growing CNTs from the catalyst layer formed on the etched buffer layer.
When growing arrays of carbon nanotubes catalyst particles are often used as a basis for carbon to be precipitated in a tube shape. However, at high temperatures agglomeration of the catalytic particles can hinder the control of the size and density of nanotube growth. This patent from Samsung teaches using a buffer layer to prevent the agglomeration of the catalysts. Claim 1 reads:
1. A method of forming a Carbon Nanolube (CNT) structure, the method comprising:
forming an electrode on a substrate; forming a buffer layer on the electrode;
forming a catalyst layer in a particle shape on the buffer layer;
etching the buffer layer exposed through the catalyst layer; and
growing CNTs from the catalyst layer formed on the etched buffer layer.
Labels: Samsung
posted by blaisemouttet at 9:54 PM
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