Monday, March 29, 2010

US Patent 7682973 - Buffer layer in CNT growth

When growing arrays of carbon nanotubes catalyst particles are often used as a basis for carbon to be precipitated in a tube shape. However, at high temperatures agglomeration of the catalytic particles can hinder the control of the size and density of nanotube growth. This patent from Samsung teaches using a buffer layer to prevent the agglomeration of the catalysts. Claim 1 reads:

1. A method of forming a Carbon Nanolube (CNT) structure, the method comprising:

forming an electrode on a substrate; forming a buffer layer on the electrode;

forming a catalyst layer in a particle shape on the buffer layer;

etching the buffer layer exposed through the catalyst layer; and

growing CNTs from the catalyst layer formed on the etched buffer layer.