US Patent 7610797 - Inductive CNT force sensor

http://www.freepatentsonline.com/7610797.html

This patent from Xidex Corporation teaches a force sensing system for a scanning probe microscope that uses a carbon nanotube to improve sensitivity to vibrations in multiple directions. Claim 1 reads:

1. A device, comprising:

a support structure;

at least one carbon nanotube extending from the support structure; and

a detection system comprising an inductive pick-up coil and a tank circuit;

wherein the detection system is operable to detect vibrations from the at least one carbon nanotube.