Monday, November 23, 2009

US Patent 7619810 - MEMS array testing

This patent from IDC LLC (now part of Qualcomm) has very early priority (1994) and includes very basic claims to array-based testing of micromechanical devices. Claim 23 reads:

23. A system comprising:

an array of nodes organized into rows and columns, each node having a micro-electromechanical (MEM) device, a first switch coupling a column line to the MEM device and a second switch coupling a voltage to the MEM device; and,

a testing mechanism situated outside of the array of nodes to test each node for proper operation by selecting a row and a column of the nodes in which the node is located to turn on the first and the second switches of the node.