Tuesday, July 07, 2009

US Patent 7556746 - Nanotube applicator liquid for electronics fabrication


This patent from Nantero teaches a purified nanotube solution suitable for spin-coating processes used in the manufacture of integrated circuits. Claim 1 reads:

1. A method of making an applicator liquid containing nanotubes of high purity while achieving a stable distribution of nanotubes in the liquid for use in an electronics fabrication process, comprising:

dispersing nanotubes into a solvent at a concentration of at least one milligram of nanotubes per liter solvent without addition of surfactants or polymers to form the applicator liquid;

wherein the applicator liquid is substantially free of particulates having a diameter greater than about 500 nm;

wherein the applicator liquid has a level of metal impurities that is less than about 1×1018 atoms/cm3; and

wherein the nanotubes are distributed in the solvent without substantial precipitation or flocculation.