US Patent 7553681 - CNT stress sensor manufacture

http://www.freepatentsonline.com/7553681.html

This patent from Intel teaches forming a carbon nanotube based sensor for detecting stresses formed between integrated circuit dies and packaging. Claim 1 reads:

1. A method comprising:

depositing a first array of carbon nanotubes (CNTs) aligned in a first orientation at a first location on a substrate or a die in a wafer;

intercalating the first array with polymer;

covering the first polymer-intercalated array with a nitride layer;

depositing a second array of CNTs aligned in a second orientation at a second location on the substrate or the die; and

intercalating the second array with polymer.