US Patent 7514853 - Stress inverter MEMS resonator

http://www.freepatentsonline.com/7514853.html

This is another patent from Silicon Clocks teaching a solution to thermal expansion mismatch in MEMS structures. Claim 1 reads:

1. A MEMS structure, comprising:

a stress inverter member coupled with a substrate; and

a resonating member housed in said stress inverter member and suspended above said substrate.