US Patent 7514760 - IC compatible MEMS resonator

http://www.freepatentsonline.com/7514760.html

Although the fabrication of microelectromechanical systems (MEMS) involves many of the same process steps as integrated circuit fabrication it is often difficult to integrate control circuitry with MEMS structures without excessive complication of the process. This patent from Silicon Clocks teaches a new type of process they call CMEMS which may make such integration easier leading to reduced cost of microsensor and microactuator fab. Claim 1 reads:

1. An integrated circuit having a MEMS device, comprising:

a plurality of semiconductor devices formed on a substrate;

a plurality of interconnects above and coupled with said plurality of semiconductor devices, wherein said plurality of interconnects incorporates said plurality of semiconductor devices into said integrated circuit; and

a MEMS resonator above and coupled with said plurality of interconnects, wherein said MEMS resonator is comprised of a member, a driver electrode and a sensor electrode, wherein said driver electrode and said sensor electrode are electrically coupled with said plurality of interconnects.