US Patent 7468221 - Integration of MEMS with microbatteries

http://www.freepatentsonline.com/7468221.html

This is another in a series of very fundamental patents to a company called Bipolar Technologies which teaches the integration of microbatteries with microelectromechanical devices. Claim 1 reads:

1. In combination, at least one microelectromechanical system and a source of electrical energy internal within the microelectromechanical system comprising a microfabricated microscopic battery having a size congruent with the microelectromechanical system.