US Patent 7432217 - Formation of uniform length nanotubes using organic film planarization
http://www.freepatentsonline.com/7432217.html
This patent from Samsung teaches a method of forming a uniform length carbon nanotube array for FED applications by planarization of an organic film. Claim 1 reads:
1. A method of achieving uniform lengths of Carbon NanoTubes (CNTs), the method comprising:
forming CNTs of varying lengths on a predetermined material layer;
coating an organic film to cover the CNTs formed on the predetermined material layer;
etching the organic film to a predetermined depth to remove projected portions of the CNTs; and
removing the organic film to leave CNTs of uniform length.
One pertinent prior art patent that was overlooked during examination is US Patent 6,283,812 (see Fig. 4A-4D).
This patent from Samsung teaches a method of forming a uniform length carbon nanotube array for FED applications by planarization of an organic film. Claim 1 reads:
1. A method of achieving uniform lengths of Carbon NanoTubes (CNTs), the method comprising:
forming CNTs of varying lengths on a predetermined material layer;
coating an organic film to cover the CNTs formed on the predetermined material layer;
etching the organic film to a predetermined depth to remove projected portions of the CNTs; and
removing the organic film to leave CNTs of uniform length.
One pertinent prior art patent that was overlooked during examination is US Patent 6,283,812 (see Fig. 4A-4D).
Labels: Samsung
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