US Patent 7190092 - Scrubbing MEMS contacts
http://www.freepatentsonline.com/7190092.pdf
Stiction is a problem commonly associated with micromechanical structures and results from chemical residue or electrostatic charges which can build up and leave a microstructure stuck in a particular position. This patent fro a company called Teravicta proposes a fairly basic solution involving controlled scrubbing of the MEMS surfaces to reduce the stiction effect. Claim 1 reads:
1. A micro-electromechanical switch module, comprising: a micro-electromechanical switch having a control element and a contact surface; and signal generation circuitry adapted to electrically, thermally or magnetically actuate the switch sufficient to provide repetitive scrubbing action between contacts of the switch during at least a portion of time when the switch is closed.
Stiction is a problem commonly associated with micromechanical structures and results from chemical residue or electrostatic charges which can build up and leave a microstructure stuck in a particular position. This patent fro a company called Teravicta proposes a fairly basic solution involving controlled scrubbing of the MEMS surfaces to reduce the stiction effect. Claim 1 reads:
1. A micro-electromechanical switch module, comprising: a micro-electromechanical switch having a control element and a contact surface; and signal generation circuitry adapted to electrically, thermally or magnetically actuate the switch sufficient to provide repetitive scrubbing action between contacts of the switch during at least a portion of time when the switch is closed.
Labels: MEMS
posted by blaisemouttet at 3:04 PM
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