US Patent 7144287 - Individually Addressable Vertical Nanofibers

http://www.freepatentsonline.com/7144287.pdf

Electron emission based devices such as field emission flat panel displays and e-beam lithography tools are a significant application for vertical carbon nanofibers arrays. Usually such devices actuate a plurality of nanofibers extending from a singular common electrode. This patent from Oak Ridge National Labs teaches formation of individual addressing electrodes for each of the nanofibers for higher resolution digital control on nanofiber arrays. Claim 1 reads:

1. A method, comprising: forming a first individually electrically addressable electrically conductive interconnect directly on at least a part of an insulating surface on a substrate; growing a first vertically aligned carbon nanofiber that is coupled to the first individually electrically addressable electrically conductive interconnect; forming a second individually electrically addressable electrically conductive interconnect directly connected to the insulating surface: growing a second vertically aligned carbon nanofiber that is coupled to the second individually electrically addressable elecrtically conductive interconnect: wherein the first vertically aligned carbon nanofiber is individually electrically addressable via the first individually electrically addressable electrically conductive interconnect and the second vertically aligned carbon nanofiber is individually electrically addressable via the second individually electrically addressable electrically conductive interconnect.