Wednesday, May 25, 2011

US Patent 7948042 - Graphene-based MEMS

This patent is from the Regents of the University of California and teaches how graphene can be use to form pn and npn control structures for microelectromechanical systems. Claim 1 reads:

1. A suspended structure, comprising:

a substrate having a first surface;

an electrically conductive structure suspended above the first surface of the substrate;

a graphene layer positioned upon the first surface of the substrate and beneath the suspended electrically conductive structure; and

a dielectric interposed between the electrically conductive suspended structure and the graphene layer.