Tuesday, January 18, 2011

US Patent 7871851 - Nanotube/CMOS integration


Nantero has been working on nanotube electronics for the past decade and in the last few years have been focusing on integrating carbon nanotubes with CMOS processes. This patent from RF Nano may offer some useful methods to achieve such integration. Claim 1 reads:

1. A method, comprising:

integrating the formation of nanotube devices into a complementary metal oxide semiconductor (CMOS) process flow to form nanotube devices in a nanotube region of a substrate and CMOS devices in a CMOS region of the same substrate that involves

(i) protecting the CMOS region from certain nanotube fabrication processes while fabricating the nanotube devices and

(ii) protecting the nanotube region from certain CMOS fabrication processes while fabricating the CMOS devices.