Thursday, July 22, 2010

US Patent 7759150 - TiO2 nanorod sensor

This patent from Sharp teaches a gas sensor fabrication method using titanium dioxide nanowires to achieve high sensitivity at low production cost. Claim 1 reads:

1. A method for fabricating a nanorod sensor with a single plane of horizontally-aligned electrodes, the method comprising:

providing a substrate;

forming an intermediate electrode from a patterned bottom noble metal/Pt/Ti multilayered stack overlying a center region of the substrate;

forming TiO2 nanorods;

forming a single plane of top electrodes overlying the TiO2 nanorods; and,

forming a TiO2 film interposed between the TiO2 nanorods and electrodes selected from a group consisting of the intermediate electrode, the top electrodes, and both the intermediate and top electrodes.