US Patent 7655544 - Self-assembling quantum nanostructures using laser interference
http://www.freepatentsonline.com/7655544.html
This patent from Utah State University teaches a manufacturing method for growing InAs quantum wires on a GaAs substrate using a laser interference patterning technique. Claim 1 reads:
1. A method of producing self-assembling quantum nanostructures, the method comprising:
depositing epitaxially on a substrate at least one layer of a semiconductor material;
creating at least one laser interference pattern with a laser; and
directing the at least one laser interference pattern onto the substrate thus nanoheating the deposited semiconductor material and the substrate with the laser interference pattern,
wherein the self-assembling quantum nanostructures are produced at the maxima of the laser interference pattern.
This patent from Utah State University teaches a manufacturing method for growing InAs quantum wires on a GaAs substrate using a laser interference patterning technique. Claim 1 reads:
1. A method of producing self-assembling quantum nanostructures, the method comprising:
depositing epitaxially on a substrate at least one layer of a semiconductor material;
creating at least one laser interference pattern with a laser; and
directing the at least one laser interference pattern onto the substrate thus nanoheating the deposited semiconductor material and the substrate with the laser interference pattern,
wherein the self-assembling quantum nanostructures are produced at the maxima of the laser interference pattern.
Labels: Utah State University
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