US Patent 7644622 - MEMS pressure sensor with nanotube membrane

http://www.freepatentsonline.com/7644622.html

This patent from Hon Hai Precision exploits the piezoresistive characteristics of carbon nanotube membranes in a MEMS sensor. Claim 1 reads:

1. A micro-electro-mechanical pressure sensor comprising:

a substrate having an acoustic cavity;

a dielectric isolation layer formed on the substrate, the dielectric isolation layer having a through hole corresponding to the acoustic cavity;

at least two electrodes formed on the dielectric isolation layer; and

a vibrating membrane formed on the dielectric isolation layer and covering the through hole, the vibrating membrane comprising at least one carbon nanotube structure, the at least one carbon nanotube structure, respectively, being electrically connected with the at least two electrodes.