US Patent 7634162 - CNT de-magnification lens for nanolithography

http://www.freepatentsonline.com/7634162.html

This patent from Boston College suggests manufacturing methods to produce nano-optics which extend the resolution of optical lithography. Claim 1 reads:

1. A de-magnifying lens for use in a standard photolithography system comprising:

a film having a top surface, a bottom surface and a plurality of cylindrical channels containing a dielectric material; and

an array of carbon nanotubes penetrating and converging through the film through the plurality of cylindrical channels, wherein an image on the top surface of the film is converted into a de-magnified image on the bottom surface of the film by the carbon nanotubes, wherein each carbon nanotube connects a light-receiving pixel on the top surface of the film with a light-emitting pixel on the bottom surface of the film, and wherein the light-receiving pixels on the top surface of the film are indirectly mapped to the light-emitting pixels on the bottom surface of the film by scrambled wiring through a nano-coaxial transmission line.