Thursday, May 28, 2009

US Patent 7538474 - MEMS testing via phonon stimulation

This patent from the National University of Singapore teaches a new reliability testing system for MEMS devices based on an acoustic sensing method which can be less invasive than previous methods. Claim 1 reads:

1. A system for Micro Electro Mechanical System (MEMS) device characterization, the system comprising:

a stimulator for stimulating the device to generate phonons in the device;

a detector for detecting the generated phonons; and

a converter for converting the phonons into a signal representative of displacement of a MEMS component of the device.