Thursday, March 06, 2008

US Patnet 7339244 - 3D MEMS lattice structure

This patent from Cornell Research Foundation included some basic claims to treelike silicon structures formed so as to create a 3D structure useful as a filter for nanofluidics or in optical sensors/amplifiers. Claims 1 and 13 read:

1. A pair of columns formed from a semiconductor substrate, the columns comprising: multiple wires of silicon extending substantially parallel to a floor of the substrate between the pair of columns; and oxide surrounding each wire.

13. A three dimensional lattice of tips formed from a semiconductor substrate comprising: an array of substantially parallel pillars; and a nanotip on each pillar extending substantially perpendicular from the pillar to an adjacent pillar.