US Patent 7312915 - Low inertia MEMS

http://www.freepatentsonline.com/7312915.html

Texas Instruments is one of the first innovators in micromirror technologies. This latest patent teaches using low inertia materials to form the movable member which can enhance the responsiveness of the device to driving signals and reduce problems related to stiction. Claim 1 reads:

1. A microelectromechanical device, comprising: a microelectromechanical deflectable element held on a substrate such that the microelectromechanical element is capable of moving relative to the substrate, and wherein the element has a mass inertia of 1.2×10−24 kg·m2 or less.