US Patent 7098144 - IrOx Nanotubes
http://www.freepatentsonline.com/7098144.pdf
While carbon nanotubes are the most commonly used type of nanotube, other types have been experimented with such as silicon based and chalcogenide (Se, S or Te based) nanotubes. This patent claims a method for fabricating iridium oxide nanotubes. Claim 1 reads:
1. A method for forming iridium oxide (IrOx) nanotubes, the method comprising: providing a substrate with a surface; introducing a (methylcyclopentadienyl)(1,5-cyclooctadiene)iridium(I) precursor as follows: initially heating the precursor to a first temperature in the range of 60 to 90 degrees C.; maintaining the first temperature in the transport line introducing the precursor; and mixing the precursor with a carrier gas; introducing oxygen as a precursor reaction gas; and, using a metalorganic chemical vapor deposition (MOCVD) process, growing IrOx hollow nanotubes from the substrate surface.
While carbon nanotubes are the most commonly used type of nanotube, other types have been experimented with such as silicon based and chalcogenide (Se, S or Te based) nanotubes. This patent claims a method for fabricating iridium oxide nanotubes. Claim 1 reads:
1. A method for forming iridium oxide (IrOx) nanotubes, the method comprising: providing a substrate with a surface; introducing a (methylcyclopentadienyl)(1,5-cyclooctadiene)iridium(I) precursor as follows: initially heating the precursor to a first temperature in the range of 60 to 90 degrees C.; maintaining the first temperature in the transport line introducing the precursor; and mixing the precursor with a carrier gas; introducing oxygen as a precursor reaction gas; and, using a metalorganic chemical vapor deposition (MOCVD) process, growing IrOx hollow nanotubes from the substrate surface.
posted by blaisemouttet at 10:38 PM
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