Sunday, September 03, 2006

US Patent 7098144 - IrOx Nanotubes

While carbon nanotubes are the most commonly used type of nanotube, other types have been experimented with such as silicon based and chalcogenide (Se, S or Te based) nanotubes. This patent claims a method for fabricating iridium oxide nanotubes. Claim 1 reads:

1. A method for forming iridium oxide (IrOx) nanotubes, the method comprising: providing a substrate with a surface; introducing a (methylcyclopentadienyl)(1,5-cyclooctadiene)iridium(I) precursor as follows: initially heating the precursor to a first temperature in the range of 60 to 90 degrees C.; maintaining the first temperature in the transport line introducing the precursor; and mixing the precursor with a carrier gas; introducing oxygen as a precursor reaction gas; and, using a metalorganic chemical vapor deposition (MOCVD) process, growing IrOx hollow nanotubes from the substrate surface.