US Patent 8043593 - Silicon nanopowder

http://www.freepatentsonline.com/8043593.html

This patent has early priority (2003) and teaches a method of forming high purity crystalline silicon nanopowder including doping components useful to nanoelectronic processing. Claim 1 reads:

1. A silicon powder consisting of aggregated spherical crystalline silicon particles obtained by coalescence of spherical silicon particles in the reaction zone of a hot wall reactor, wherein the aggregated crystalline silicon powder has a BET surface area of 20 to 150 m2/g.