Monday, November 17, 2008

US Patent 7449758 - Organic piezoresistive MEMS resonator

Piezoresistive sensing is quite common to micromechanical sensors but is usually carried out using metal or semiconductor materials. This patent from researchers at CalTech teaches a biocompatible version using pentacene. Claim 1 reads:

1. A MEMS system comprising:

a micromechanical resonator; and

a piezoresistive sensing element comprising an organic semiconductor.