Friday, September 07, 2007

US Patent 7264990 - Semiconductor processing using nanotube films

This patent from Nantero is fairly fundamental to the use of basic semiconductor processing methods in forming electronic devices using nanotube films. Claim 7 is representative.

7. A method of making a conductive article on a substrate, comprising: providing a substantially planar fabric of pre-formed nanotubes on the substrate; depositing a mask layer over the fabric of pre-formed nanotubes; defining a pattern in the mask layer, the pattern corresponding to the shape of the conductive article; removing nanotubes in accordance with the pattern of the mask layer to define the conductive article.