US Patent 7214303 - Branched nanostructure for atomic force microscopy
http://www.freepatentsonline.com/7214303.html
The atomic force microscope (AFM) and related proximity probes have been used for nanoscale analysis since the 1980's. More recently nanotubes have been formed on the tips of AFMs to provide higher resolution and allow for inspection of high aspect ratio cavities in substrates. This patent from Boston College teaches using a branched (Y-junction) nanotube as a nanocantilever structure for an AFM. Claim 1 reads:
1. A cantilever probe comprising: a first electrode and a second electrode engaged to a substrate; a branched cantilever comprising a nanostruture; a first arm of the cantilever engaging the first electrode and a second arm of the cantilever engaging the second electrode; and an electrical circuit coupled to the cantilever wherein the electrical circuit measures a change in piezoresistance of the cantilever resulting from an atomic force applied to the cantilever.
The atomic force microscope (AFM) and related proximity probes have been used for nanoscale analysis since the 1980's. More recently nanotubes have been formed on the tips of AFMs to provide higher resolution and allow for inspection of high aspect ratio cavities in substrates. This patent from Boston College teaches using a branched (Y-junction) nanotube as a nanocantilever structure for an AFM. Claim 1 reads:
1. A cantilever probe comprising: a first electrode and a second electrode engaged to a substrate; a branched cantilever comprising a nanostruture; a first arm of the cantilever engaging the first electrode and a second arm of the cantilever engaging the second electrode; and an electrical circuit coupled to the cantilever wherein the electrical circuit measures a change in piezoresistance of the cantilever resulting from an atomic force applied to the cantilever.
Labels: Boston College, scanning probe microscope
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