Monday, October 30, 2006

US Patent 7126207 - Capacitor with Carbon Nanotubes

High capacitance circuit elements are useful for decoupling power supplies from high frequency noise. Since capacitance is directly related to the interface area between two separated electrodes, very high capacitances can be achieved using high surface-to-volume materials. This patent from Intel teaches the formation of a capacitor from an array of vertically oriented nanotubes. Claim 1 reads:

1. A capacitor, comprising: a substrate defining a first electrical terminal; a catalyst layer disposed on the substrate; a plurality of carbon nanotubes disposed on the catalyst layer and electrically coupled through the catalyst layer to the substrate; a dielectric layer disposed over the plurality of carbon nanotubes; and a conductive layer disposed on the dielectric layer and defining a second electrical terminal.